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Rotary Tube PECVD System for Rare Metal Powder Surface Modification

For your custom heating needs, reach us here:

1. Customer Profile

The customer is a professional domestic Chinese rare metal materials enterprise, dedicated to the R&D and mass production of high-purity rare metal powders, composite powder materials and advanced functional powders. Facing technical bottlenecks in uniform surface coating treatment of microscale rare metal powder materials, the enterprise was searching for customized plasma deposition equipment suitable for batch powder processing.muAMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 muAMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

2. Project Background

Traditional stationary tube furnace PECVD equipment can only process static samples. For powdery raw materials, uneven coating, poor consistency and low batch yield frequently occur. The client required a deposition system that meets the following core demands:muAMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

  1. Achieve homogeneous film coating on large quantities of rare metal powder;
  2. Integrate heating and radio frequency plasma enhanced CVD function;
  3. Realize continuous powder tumbling inside the furnace tube to avoid powder agglomeration;
  4. Support adjustable heating temperature, rotating speed and tilt angle for flexible process exploration.

3. Solution & Equipment Configuration

After technical communication and scheme optimization, we delivered the PT-T1200-PECVD Rotary Tube Plasma Enhanced Chemical Vapor Deposition System. Main technical specifications:muAMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

  • Model: PT-T1200-PECVD
  • Heating structure: 3 heating zones, each zone 220 mm; heating element: resistance wire
  • Max heating rate: 0–20 ℃/min; 3 sets K-type thermocouples for independent temperature monitoring
  • Furnace tube: Variable-diameter quartz tube, transition from Φ80 mm to Φ150 mm, inner diameter 140 mm; with built-in material lifting baffles
  • Rotary structure: 0–15° tilt adjustable, 360° continuous rotation, rotating speed 0–15 rpm stepless adjustable
  • Control system: 7-inch touchscreen integrated control

The built-in lifting baffles inside the rotary quartz tube continuously stir rare metal powder during operation. Combined with RF plasma, uniform thin film deposition is realized on particle surfaces. The tilting design further facilitates raw material feeding and discharging, supporting both laboratory research and small-batch trial production.muAMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 muAMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

rotary pecvd systemmuAMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
 muAMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac

4. Project Outcomes

  1. Uniform coating effect: Powder particles are continuously tumbled during deposition. The plasma thin film coating uniformity of rare metal powder has been greatly improved compared with static processing.
  2. High process flexibility: Adjustable temperature curve, rotating speed and tilt angle allow the customer to develop multiple coating processes for different rare metal powder products.
  3. Equipment stability: Integrated touch control realizes one-click operation of heating, rotation, gas path and plasma system, lowering operation difficulty for the R&D team.
  4. Extended application potential: Apart from rare metal powder surface modification, the equipment can also be used for surface treatment of alloy powder, ceramic powder and other advanced powder materials.

muAMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac
5. Customer Feedback

“This customized rotary PECVD equipment successfully solves our long-standing problem of uneven coating on powder samples. The rotating furnace tube with material lifting baffles perfectly matches our powder processing requirements. PROTECH provides professional customized design and reliable after-sales technical support, which is exactly what we need for advanced powder material development.”muAMuffle Furnace,Tube Furnace,Vacuum Furnace,Atmosphere Furnac